Anisotropic Wet Etching Of Silicon9/2/2020
Are you a specialist To avoid being rejected access, journal in if youré a ResearchGate member or make an account if youre not.Corpus ID: 55784206 A Research on Anisótropic Etching of (100) Silicon in Aqueous KOH Option articleAlvi2008AThus.
![]() Etching price of damp etching of (100) silicon in natural KOH answer has long been experimentally established with varying KOH concentration and the temperature of the KOH answer. Atomic force microscopy (AFM) ánd optical microscopy possess been employed for the inspection of the high quality of the etched areas. It provides been observed that the etching rate boosts with CONTINUE Reading through Conserve to Library Create Sound the alarm Cite Release Research Give food to Share This Document Best 3 of 12 Details Watch All Impact of isopropyl alcoholic beverages (IPA) on etching price and surface area roughness of silicon etched in KOH alternative N. Burham, A new. A new. Hamzah, N. ![]() Testosterone levels. Hajjiah, Suji E. Zachariah, Moustafa Y. Figures shape 1 body 2 figure 3 body 4 physique 6 body 7 Watch All 6 Statistics Tables Citations Books citing this document. CITATION Kind All Sorts Cites Results Cites Methods Cites History SORT BY Relevance Highly Influenced Papers Recency Appearing 1-10 OF 12 Details Impact of isopropyl alcoholic beverages (IPA) on etching price and surface roughness of silicon etched in KOH answer N. Y. Majlis Materials Research 2015 IEEE Regional Seminar on Micro ánd Nanoelectronics (RSM) 2015 Watch 1 EXCERPT CITES BACKGROUND Impact of Isopropyl Alcoholic beverages Focus and Etching Period on Damp Chemical Anisotropic Etching óf Low-Resistivity CrystaIline Silicon Wafer Eyád Abdur-Rahman, lbrahim Alghoraibi, Hassan AIkurdi Chemistry and biology, Medicine World paper of analytical biochemistry 2017 Look at 2 EXCERPTS CITES History Research of surface morphology and optical characterization of crystalline ánd multi-crystalline siIicon surface textured in highly diluted alkaline options A. Ghannam Components Science 2014 Look at 2 EXCERPTS CITES Outcomes Strategies Highly Influenced KOH wet etching technique for designed development on surface of quartz crystal with AuPd mask Masruroh, Deb.J. Djoko L. Santjojo, Setyawan P. Sakti, Irna Nova Components Technology 2016 Cosmopolitan Seminar on Detectors, Instrumentation, Measurement and Metrology (ISSIMM) 2016 Watch 1 EXCERPT CITES History Manufacture of free-stánding nanoscale SiNx walls with enhanced burst stress via enhanced etching procedure Hyeon Jin Shin, In-Sung Park, 3 authors Jinho Ahn Executive 2019 Roughness kinetic and multiaffinity of anisotropic etched silicon S. Hosseinabadi, Majid Rájabi Physics 2017 Iso-height ranges of multifractal etched silicon rough areas S. Hosseinabadi Chemistry 2018 A brand-new processing technique for manufacture of ultra-thin wafer Yibo Zeng, M. Zhang, L. Zhou, Hang up Guo Engineering 2019 Fabrication of a fuIl-size EUV peIlicle structured on silicon nitride Dario M. Goldfarb Materials Science, Engineering SPIE Photomask Technologies 2015 Look at 1 EXCERPT CITES History Wet silicon etch procedure for TSV reveal Laura B. Mauer, Tom Taddei, 4 authors Craig Allen Materials Technology 2014 IEEE 64tl Electronic Elements and Technology Conference (ECTC) 2014 VIEW 4 EXCERPTS CITES BACKGROUND Highly Influenced 1 2 Work references Periodicals referenced by this papers. Displaying 1-5 OF 5 REFERENCES Anisotropic Etching of Crystalline Silicon in Alkaline Solutions I. Orientation Dependence and Behaviour of Passivation Levels H. Seidel, L. Csepregi, A new. Heuberger, L. Baumgrtel Biochemistry 1990 Anisotropic etching of the silicon crystal-surface free energy design J. Schroeder, Age. Obermeier, A new. Steckenborn Materials Research 1999 Schiffin L. Micromech. Microeng. Related Papers Abstract Numbers 12 Details 5 References Related Documents The Allen Company for AI Proudly constructed by AI2 with the help of our Collaborators making use of these Resources. Research Publisher Partnerships Information Relationships API and Open up Corpus Terms of Services Privacy Policy By clicking accept or carrying on to make use of the web site, you agree with the fact to the conditions specified in our Personal privacy Policy, Terms of Services, and Dataset Permit ACCEPT CONTINUE.
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